<!DOCTYPE html PUBLIC "-//W3C//DTD XHTML 1.1//EN"
  "http://www.w3.org/TR/xhtml11/DTD/xhtml11.dtd">
<html xmlns="http://www.w3.org/1999/xhtml" xml:lang="en">
<head>
<meta name="generator" content="jemdoc, see http://jemdoc.jaboc.net/" />
<meta http-equiv="Content-Type" content="text/html;charset=utf-8" />
<link rel="stylesheet" href="jemdoc.css" type="text/css" />
<title>piezoD - piezoresistive and piezoelectric cantilever design optimization</title>
</head>
<body>
<table summary="Table for page layout." id="tlayout">
<tr valign="top">
<td id="layout-menu">
<div class="menu-category">piezoD</div>
<div class="menu-item"><a href="index.html" class="current">home</a></div>
<div class="menu-item"><a href="download.html">download</a></div>
<div class="menu-item"><a href="contributing.html">contributing</a></div>
<div class="menu-item"><a href="revision.html">revision&nbsp;history</a></div>
<div class="menu-item"><a href="contact.html">contact</a></div>
<div class="menu-category">user guide</div>
<div class="menu-item"><a href="tutorial.html">tutorial</a></div>
</td>
<td id="layout-content">
<div id="toptitle">
<h1>piezoD - piezoresistive and piezoelectric cantilever design optimization</h1>
</div>
<p>piezoD is a tool for modeling the performance and optimizing the design of piezoresistive and piezoelectric microcantilevers. It is written in object oriented Matlab, and is designed to make it fast and easy to design high performance cantilevers.</p>
<p>Features include: </p>
<ul>
<li><p>materials</p>
<ul>
<li><p>p-type and n-type single crystal silicon piezoresistive cantilevers</p>
</li>
<li><p>epitaxial or surface diffusion based fabrication</p>
</li>
<li><p>aluminum nitride (AlN) and lead zirconate titanate (PZT) piezoelectric cantilevers</p>
</li>
<li><p><b>(coming soon)</b> lookup table based ion implantation fabrication</p>
</li>
<li><p><b>(coming soon)</b> polycrystalline silicon and thin metal film cantilevers</p>
</li></ul>
</li>
<li><p>performance modeling</p>
<ul>
<li><p>noise: 1/f, johnson, amplifier, thermomechanical</p>
</li>
<li><p>mechanics: Bernoulli beam bending with accurate stiffness and resonant frequency for multilayer, segmented structures</p>
</li>
<li><p>concentration and temperature dependent effects: thermal conductivity, carrier density and mobility, piezoresistance factor</p>
</li>
<li><p>fluid damping: resonant frequency and quality factor</p>
</li>
<li><p>temperature profile: finite difference, lumped, and linearized circuit models for self-heating</p>
</li></ul>
</li>
<li><p>constraints available</p>
<ul>
<li><p>simple bounds: all design parameters, e.g. cantilever length, bias voltage</p>
</li>
<li><p>general nonlinear constraints: power dissipation, temperature, resonant frequency, resistance, spring constant, etc</p>
</li></ul>
</li>
<li><p>optimization targets</p>
<ul>
<li><p>integrated noise (force, displacement, surface stress)</p>
</li>
<li><p>noise power spectral density (force, displacement, surface stress)</p>
</li>
</ul>

</li>
</ul>
<h1>license</h1>
<p>Copyright&copy; 2009-2010 Joey Doll and Stanford Microsystems Lab</p>
<p>piezoD is free software; you can redistribute it and/or modify it under the terms of the <a href="http://www.gnu.org/licenses/gpl-3.0.html">GNU General Public License</a> as published by the Free Software Foundation; either version 3 of the License, or (at your option) any later version.</p>
<p>piezoD is distributed in the hope that it will be useful, but WITHOUT ANY WARRANTY; without even the implied warranty of MERCHANTABILITY or FITNESS FOR A PARTICULAR PURPOSE. See the <a href="http://www.gnu.org/licenses/gpl-3.0.html">GNU General Public License</a> for more details.</p>
<div id="footer">
<div id="footer-text">
Page generated 2011-01-16 22:37:47 PST, by <a href="http://jemdoc.jaboc.net/">jemdoc</a>.
</div>
</div>
</td>
</tr>
</table>
<script type="text/javascript">
var gaJsHost = (("https:" == document.location.protocol) ? "https://ssl." : "http://www.");
document.write(unescape("%3Cscript src='" + gaJsHost + "google-analytics.com/ga.js' type='text/javascript'%3E%3C/script%3E"));
</script>
<script type="text/javascript">
try {
var pageTracker = _gat._getTracker("UA-11750507-1");
pageTracker._trackPageview();
} catch(err) {}</script>
</body>
</html>
